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PDF (685KB)

4-Axis Cleaning Robot
PHT-R-4
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PDF (566KB)

3-Axis Clean Robot
PHT-R-3
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PDF (455KB)

Glass Substrate Cleaning Robot
PHT2200
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PDF (689KB)

Wafer Cassette Changer
PCT2022
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PDF (1,183KB)

Wafer Transfer Device
PWT2020
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PDF (1,081KB)

12" Compatible Single Wafer
Quartz Glass Wafer Transfer Equipment
PGT2020
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PDF (745KB)

EFEM & Sorter
P-EFEM
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PDF (745KB)

Automatic Wafer Demounter
PWD2020
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PDF (1,786KB)

Batch Type Wafer Cleaner
SCC-250
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PDF (518KB)

Single Type Wafer Cleaner
PWS2501
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PDF (633KB)

Carrier Substrate Receiving Cleaning Device
PWG-2501
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